Electrostatic capacitance type pressure detector

Measuring and testing – Fluid pressure gauge – Diaphragm

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73708, 73724, 361283, G01L 912, G01L 1302

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active

050423088

ABSTRACT:
A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitance comprising a diaphragm displaceable in response to the pressure, and a pair of fixed electrodes, one of each of the fixed electrodes being located on each side of the diaphragm and being electrostatically capacitively coupled to the diaphragm, each of the fixed electrodes being shaped to essentially eliminate electrostatic capacitances that are not differentially linear with respect to the pressure.

REFERENCES:
patent: 2999386 (1961-09-01), Wolfe
patent: 4169389 (1979-10-01), Yasuhara et al.
patent: 4405970 (1983-09-01), Swindal
patent: 4581676 (1986-04-01), Baxter et al.
patent: 4683754 (1987-08-01), Hirata et al.
patent: 4701826 (1987-10-01), Mikkor
U.S. Patent Application Ser. No. 07/226,915 filed Aug. 1, 1988.

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