Electrostatic capacitance type acceleration sensor

Details Electrostatic capacitance type acceleration sensor Electrostatic capacitance type acceleration sensor

2007-11-01

2009-12-01

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514180

Reexamination Certificate

active

07624638

ABSTRACT:
First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

REFERENCES:
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4736629 (1988-04-01), Cole
patent: 5220835 (1993-06-01), Stephan
patent: 5488864 (1996-02-01), Stephan
patent: 6467345 (2002-10-01), Neukermans et al.
patent: 6494094 (2002-12-01), Tsugai et al.
patent: 6543286 (2003-04-01), Garverick et al.
patent: 6955086 (2005-10-01), Yoshikawa et al.
patent: 5-133976 (1993-05-01), None

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