Electrostatic capacitance sensor type measurement apparatus

Details Electrostatic capacitance sensor type measurement apparatus Electrostatic capacitance sensor type measurement apparatus

2006-03-28

2006-03-28

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S658000, C324S686000, C324S699000

Reexamination Certificate

active

07019538

ABSTRACT:
A measurement apparatus which measures a distance between a sensor probe and a target to be measured by using an electrostatic capacitance sensor, comprises first and second sensor probes (101, 102) which are arranged at respective predetermined gaps to the target (4), and first and second sensor amplifiers (111, 112) which are connected respectively to the first and second sensor probes, wherein when the distance between the target and the first or second sensor probe is measured, said first amplifier supplies a first current with the first sensor probe and said second amplifier supplies a second current which is different phase and/or amplitude from the first current.

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