Electrostatic capacitance diaphragm vacuum gauge and vacuum...

Details Electrostatic capacitance diaphragm vacuum gauge and vacuum... Electrostatic capacitance diaphragm vacuum gauge and vacuum...

2009-03-16

2010-11-30

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000

Reexamination Certificate

active

07841239

ABSTRACT:
In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic capacitance between the diaphragm and detection electrode. The electrostatic capacitance diaphragm vacuum gauge includes atmospheric pressure variation factor detection units which detect atmospheric pressure variation factors as external factors that varies the pressure of the vacuum. The pressure of the vacuum is measured by subtracting information detected by the atmospheric pressure variation factor detection units.

REFERENCES:
patent: 5917264 (1999-06-01), Maruno et al.
patent: 6422088 (2002-07-01), Oba et al.
patent: 6598483 (2003-07-01), Miyashita et al.
patent: 6877383 (2005-04-01), Horie et al.
patent: 6945115 (2005-09-01), Wang
patent: 2002/0011114 (2002-01-01), Miyashita et al.
patent: 2003/0019299 (2003-01-01), Horie et al.
patent: 2009/0301211 (2009-12-01), Yoshikawa et al.
patent: 1340007 (2002-03-01), None
patent: 1350636 (2002-05-01), None
patent: 2001-255225 (2001-09-01), None
patent: 00/47429 (2000-08-01), None
patent: 00/70321 (2000-11-01), None
Chinese Office Action dated Mar. 1, 2010, in related corresponding Chinese Patent Appln. No. 200910126814.9 (with English translation).

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