Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2007-04-24
2007-04-24
Hirshfeld, Andrew H. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C324S658000, C324S661000, C324S688000
Reexamination Certificate
active
11208585
ABSTRACT:
An electrostatic capacitance detection device includes an electrostatic capacitance detection element arranged in M rows and N columns. The electrostatic capacitance detection element includes a signal detection element that retains a charge in proportion to the electrostatic capacitance. The signal detection element includes a capacitance detection electrode and a capacitance detection dielectric layer formed on the capacitance detection electrode. The capacitance detection dielectric layer includes a first semiconductor layer and an insulator disposed between the capacitance detection electrode and the first semiconductor layer. A signal amplification element amplifies a signal corresponding to the retained charge in the signal detection element. The signal amplification element includes a second semiconductor layer different from the first semiconductor layer. A power supply line supplies a power source to the electrostatic capacitance detection element.
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Hirshfeld Andrew H.
Nguyen Hoai-An D.
Seiko Epson Corporation
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