Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2006-03-28
2006-03-28
Benson, Walter (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C324S658000
Reexamination Certificate
active
07019540
ABSTRACT:
An electrostatic capacitance detection circuit10comprises an AC voltage generator11, an operational amplifier14of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter16, a resistance (R1)12connected between the AC voltage generator11and an inverting input terminal of the operational amplifier14, a resistance (R2)13connected between the inverting input terminal of the operational amplifier14and an output terminal of the impedance converter16, and an impedance element (a capacitor)15connected between an output terminal of the operational amplifier14and an input terminal of the impedance converter16, and a capacitor to be detected17is connected between the input terminal of the impedance converter16and specific potential. The electrostatic capacitance detection circuit10and the capacitor17are located adjacently.
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Ikeuchi Naoki
Yakabe Masami
Benson Walter
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Tokyo Electron Limited
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