Optics: image projectors – Reflector – Plural
Reexamination Certificate
2007-07-31
2007-07-31
Nguyen, Judy (Department: 2851)
Optics: image projectors
Reflector
Plural
C353S033000, C348S771000, C359S291000, C359S290000
Reexamination Certificate
active
10868603
ABSTRACT:
An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.
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Microsoft Corporation
Nguyen Judy
Sever Andrew
Woodcock & Washburn LLP
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