Electrostatic actuator with multilayer electrode stack

Details Electrostatic actuator with multilayer electrode stack Electrostatic actuator with multilayer electrode stack

2005-11-22

2005-11-22

Hudspeth, David (Department: 2651)

Dynamic magnetic information storage or retrieval

Automatic control of a recorder mechanism

Controlling the head

Reexamination Certificate

active

06967806

ABSTRACT:
An electrostatic actuator for adjusting a spacing. A first body has an electrically conducting surface, and a second body has a body surface separated by the spacing from the electrically conducting surface. A conductor layer and an actuator electrode are recessed in the second body, and an electrode face faces the electrically conducting surface across the spacing. The actuator electrode comprises a semi-insulating material with a combination of electrical resistivity and thickness which prevents shorting of the conductor layer to the electrical conducting surface through a dielectric breakdown in the spacing.

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