Electrostatic actuator, microswitch, micro optical switch,...

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

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Details

C200S181000

Reexamination Certificate

active

10884527

ABSTRACT:
The present switch including the present actuator has a supporting column on a substrate, and a cap plate provided on the supporting column. The supporting column pivotally supports the cap plate. At ends of the cap plate, a plurality of beams are provided, respectively. The plurality of beams are subjected to electrostatic force of absorbing electrodes. According to the present switch, tilting directions of the cap plate (beams) can be set freely. Therefore, by providing the beams in a plurality of directions desired by a user and positioning the absorbing electrodes on the substrate so that the absorbing electrodes respectively correspond to the beams, the cap plate can be tilted in a plurality of desired directions. With this arrangement, the present switch has high degree of freedom as to the positions and number of substrate contact points.

REFERENCES:
patent: 5638946 (1997-06-01), Zavracky
patent: 6069540 (2000-05-01), Berenz et al.
patent: 6777629 (2004-08-01), Lane et al.
patent: 2005/0219017 (2005-10-01), Shirakawa
patent: 2002-287045 (2002-10-01), None
“Current Situation of MEMS Technology and Its Problems,” Technology Evaluation and Research Report (Technology Trend) No. 3, Published Mar. 28, 2003, issued by Ministry of Economy, Trade, and Industry, Industrial Science and Technology Policy and Environmental Bureau, Technology Evaluation and Research Division, Manufacturing Industries Bureau, Industrial Machinery Division.

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