Electrostatic actuator, droplet ejection head and droplet...

Details Electrostatic actuator, droplet ejection head and droplet... Electrostatic actuator, droplet ejection head and droplet...

2007-03-13

2007-03-13

Stephens, Juanita D. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S068000

Reexamination Certificate

active

11013102

ABSTRACT:
An electrostatic actuator is provided which can increase the amount of displacement of a diaphragm, thereby improving the ejection pressure when employed as a drive mechanism in a droplet ejection head. The electrostatic actuator comprises: a first substrate having a diaphragm functioning as a first electrode; and a second substrate coupled to the first substrate and having a second electrode opposite the first electrode, wherein: the diaphragm is displaced with an electrostatic force generated by applying a voltage between the electrodes; and an insulation film is provided on a coupling surface of the first substrate which couples with the second substrate, and an area of the insulation film corresponding to the diaphragm has a reduced thickness region.

REFERENCES:
patent: 6224191 (2001-05-01), Saito et al.
patent: 09-039235 (1997-02-01), None
patent: 10-286952 (1998-10-01), None
patent: 2000-355103 (2000-12-01), None
patent: 2003-300326 (2003-10-01), None
Communication from Japanese Patent Office regarding related application.
Patent Abstract of Japanese Patent Document No. 11-165412.
Communication from European Patent Office regarding counterpart application.
Communication from Japanese Patent Office re: related application.
Patent Abstracts of Japan No. 2000052548.
Patent Abstracts of Japan No. 11165412.
Patent Abstracts of Japan No. 10286952.
Communication from European Patent Office re: counterpart application.

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