Electrostatic actuator, droplet discharging head, method of...

Details Electrostatic actuator, droplet discharging head, method of... Electrostatic actuator, droplet discharging head, method of...

2008-01-07

2011-12-27

Luu, Matthew (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C347S068000, C347S055000, C347S064000

Reexamination Certificate

active

08083328

ABSTRACT:
An electrostatic actuator comprises: a fixed electrode formed on a substrate; a movable electrode placed at an position opposing the fixed electrode via a predetermined gap; a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode: and an insulation film made of HfxAlyOzformed on an opposing surface of at least one of the fixed electrode and the movable electrode.

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