Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2011-07-12
2011-07-12
Stephens, Juanita D (Department: 2853)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
C347S068000, C347S070000, C347S071000
Reexamination Certificate
active
07976127
ABSTRACT:
An electrostatic actuator includes a fixed electrode formed on a substrate, a movable electrode provided so as to oppose the fixed electrode with a predetermined gap therebetween, a driving unit generating electrostatic force between the fixed electrode and the movable electrode and moving the movable electrode, insulating films provided on opposing faces of the fixed electrode and the movable electrode, at least one of the insulating films having a layered structure of silicon oxide and a dielectric material whose relative permittivity is higher than the relative permittivity of the silicon oxide, and a surface protection film provided one or both of the insulating films and made of a ceramics-based hard film or a carbon-based hard film.
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Fujii Masahiro
Hano Yoshifumi
Harness & Dickey & Pierce P.L.C.
Seiko Epson Corporation
Stephens Juanita D
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