Electrostatic actuator

Details Electrostatic actuator Electrostatic actuator

2005-03-30

2010-12-28

Mai, Anh T (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07859370

ABSTRACT:
A switch with an actuator has two supporting columns on a substrate, and a rocking plate on the supporting columns. The rocking plate is pivoted by (pivotally mounted on) the two supporting columns. The rocking plate is made of conductive material, so that it can be subjected to electrostatic force of an adsorption electrode. In the switch, it is not necessary to provide a narrow beam to support the rocking plate, because the rocking plate is pivoted by the supporting columns. Therefore, the switch is a long-life microswitch.

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“Current Situation of MEMS Technology and Its Problems,”Technology Evaluation and Resaearch Report(Technology Trend), No. 3, published on Mar. 28, 2003 by Ministry of Economy, Trade, and Industry, Industrial Science and Technology Policy and Environment Bureau, Technology Evaluation and Research Division, Manufacturing Industries Bureau, Industrial Machinery Division.

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