Electrostatic acoustic transducer based on rolling contact...

Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only

Reexamination Certificate

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C381S191000, C381S369000

Reexamination Certificate

active

07916879

ABSTRACT:
An acoustic transducer is disclosed, which comprises a micro fabricated, sound generating, or receiving, diaphragm, a conductive leaf cantilever actuator, and a counter electrode. In the acoustic transducer, the electrostatic attraction force between the counter electrode and the leaf cantilever due to an imposed electrical potential is utilized to generate a deflection of the diaphragm attached to said cantilever. In operation, the cantilever collapses on to the counter electrode, causing a significant increase in actuator driving force due to the reduction, and partial elimination, of the air gap in the transducer.

REFERENCES:
patent: 6552469 (2003-04-01), Pederson et al.
Lee, Seung S., et al “Piezoelectric cantilever microphone and microspeaker” , Journal of Microelectromechanical Systems, vol. 5, No. 4, Dec. 1996, pp. 238-242.
Han, Cheol-Hyun et al, “Fabrication of piezoelectric acoustic transducers built on cantilever-like diaphragm” , The 14th IEEE International Conference on Micro Electro Mechanical Systems, 2001, MEMS 2001, Jan. 21-25, 2001, pp. 110-113.

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