Electroresistor and method of making same

Details Electroresistor and method of making same Electroresistor and method of making same

1976-10-07

1978-02-21

Truhe, J. V.

Electric heating

Metal heating

By arc

29620, 29576B, 29578, 156625, 156627, B23K 1500

Patent

active

040754529

ABSTRACT:
A process for producing high precision electrical resistance elements and electrical resistance elements produced thereby are disclosed. The process includes the step of etching a masked metallic layer bonded to an electrically insulating substrate for a time sufficient to etch away substantially all the masking material and a predetermined portion of the metallic material to produce a high precision electrical resistance element having a predetermined ohmic value. Preferably, the masking material has an erosion rate under ion bombardment greater than the erosion rate of the metallic layer and the thickness of the masking material is established as a predetermined function of the metallic layer to be etched away.

REFERENCES:
patent: B346210 (1975-01-01), Ennis
patent: 3431640 (1969-03-01), Larsson
patent: 3663224 (1972-05-01), Hallman et al.
patent: 3758745 (1973-09-01), Wilker
patent: 3805210 (1974-04-01), Croset et al.
patent: 3846166 (1974-11-01), Saiki et al.
patent: 3851293 (1974-11-01), Clayton
patent: 3851382 (1974-12-01), Stork
patent: 3860783 (1975-01-01), Schmidt et al.
patent: 3988564 (1976-10-01), Garvin et al.
IBM - vol. 16, #4, 9/1973, "Fabricating Small Interconnection Structures."

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