Electropolishing system and process

Details Electropolishing system and process Electropolishing system and process

2003-03-18

2009-08-25

Wilkins, III, Harry D (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With mechanical abrasion or grinding

C205S147000

Reexamination Certificate

active

07578923

ABSTRACT:
The present invention provides a process for electropolishing a conductive surface of a semiconductor wafer. During the process, a contact electrode in a contact solution contacts a contact region on surface of the conductive layer with the contact solution. Further, during the process a process electrode in a process solution contacts a process region on the conductive surface with the process solution while applying an electrical potential between the contact electrode and the process electrode to electropolish the surface of the conductive layer of the process region.

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