Electropolished patterned metal layer for semiconductor devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor

Reexamination Certificate

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Details

C257S314000, C257S315000, C257S324000, C257S301000

Reexamination Certificate

active

07629630

ABSTRACT:
An electropolishing process for high resolution patterning of noble metals, such as platinum, for forming various semiconductor devices, such as capacitors or wiring patterns is disclosed.

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