Electroplating method and apparatus

Chemistry: electrical and wave energy – Processes and products

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Details

204273, 204277, C25D 704, C10G 1706

Patent

active

039336018

ABSTRACT:
An electroplating method is disclosed and includes the rotation of a substrate, submerged within an electrolytic solution, under the application of ultrasonic waves, and the ejection of the electrolytic solution containing bubbles in a direction opposite the direction of rotation of the substrate. The electroplating apparatus for electroplating the substrate submerged within the electrolytic solution disposed within an electrolytic cell applies ultrasonic waves to the solution and additionally includes a driving device for rotating the substrate, a bubble generator for entraining bubbles within the electrolytic solution, and an ejector for ejecting the electrolytic solution containing the bubbles generated by means of the bubble generator in a direction which is opposite to the direction of rotation of the substrate.

REFERENCES:
patent: 1884512 (1932-10-01), Ballard
patent: 2155392 (1939-04-01), Ballard
patent: 2435872 (1948-02-01), Coulson
patent: 2702260 (1955-02-01), Massa
patent: 2744860 (1956-05-01), Rines
patent: 2888939 (1959-06-01), Nitsche
patent: 3647646 (1972-03-01), Tucker et al.

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