Chemistry: electrical and wave energy – Processes and products
Patent
1975-03-13
1976-01-20
Tufariello, T. M.
Chemistry: electrical and wave energy
Processes and products
204273, 204277, C25D 704, C10G 1706
Patent
active
039336018
ABSTRACT:
An electroplating method is disclosed and includes the rotation of a substrate, submerged within an electrolytic solution, under the application of ultrasonic waves, and the ejection of the electrolytic solution containing bubbles in a direction opposite the direction of rotation of the substrate. The electroplating apparatus for electroplating the substrate submerged within the electrolytic solution disposed within an electrolytic cell applies ultrasonic waves to the solution and additionally includes a driving device for rotating the substrate, a bubble generator for entraining bubbles within the electrolytic solution, and an ejector for ejecting the electrolytic solution containing the bubbles generated by means of the bubble generator in a direction which is opposite to the direction of rotation of the substrate.
REFERENCES:
patent: 1884512 (1932-10-01), Ballard
patent: 2155392 (1939-04-01), Ballard
patent: 2435872 (1948-02-01), Coulson
patent: 2702260 (1955-02-01), Massa
patent: 2744860 (1956-05-01), Rines
patent: 2888939 (1959-06-01), Nitsche
patent: 3647646 (1972-03-01), Tucker et al.
Inuzuka Takahiko
Ishibashi Motochika
Maegawa Tetsuo
Mitsubishi Denki & Kabushiki Kaisha
Tufariello T. M.
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