Electroplating anode including membrane partition system and met

Details Electroplating anode including membrane partition system and met Electroplating anode including membrane partition system and met

1997-11-13

2000-10-03

Bell, Bruce F.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204283, 204297R, 204297W, C25B 1300

Patent

active

061267988

ABSTRACT:
An anode includes an anode cup, a membrane and ion source material, the anode cup and membrane forming an enclosure in which the ion source material is located. The anode cup includes a base section having a central aperture and the membrane also has a central aperture. A jet is passed through the central apertures of the base section of the anode cup and through the membrane allowing plating solution to be directed at the center of a wafer being electroplated.

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