Radiation imagery chemistry: process – composition – or product th – Electric or magnetic imagery – e.g. – xerography,... – Process of making radiation-sensitive product
Patent
1987-01-23
1988-07-26
Welsh, J. David
Radiation imagery chemistry: process, composition, or product th
Electric or magnetic imagery, e.g., xerography,...
Process of making radiation-sensitive product
430133, 430134, 430135, 427 38, 427 39, 427 451, 427 47, G03G 582
Patent
active
047600080
ABSTRACT:
A photosensitive layer is deposited by chemical vapor deposition which is enhanced both by microwave and magnetic field. The microwave and the magnetic field are cooperating in exciting a process gas. At first, the pressure in a resonating chamber is set at a low pressure in which electron cyclotron resonance. Next the pressure is increased to a level at which the process gas is excited in hybrid resonating action.
REFERENCES:
patent: 4532199 (1985-07-01), Ueno et al.
Fukada Takeshi
Yamazaki Shunpei
Ferguson Jr. Gerald J.
Semiconductor Energy Laboratory Co,. Ltd.
Welsh J. David
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