Electrophotographic photosensitive member and method of manufact

Radiation imagery chemistry: process – composition – or product th – Electric or magnetic imagery – e.g. – xerography,... – Radiation-sensitive composition or product

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430131, G03G 510

Patent

active

054807549

ABSTRACT:
A method for manufacturing an electrophotographic photosensitive member capable of providing high quality even images, which are completely free from image defects and unevenness of image density, which comprises a step for forming a non-monocrystalline deposited film comprising silicon atoms and hydrogen atoms and/or fluorine atoms on an aluminum substrate containing a fine quantity of silicon atoms by a plasma CVD method, wherein the surface of the substrate is cleaned with water in which carbon dioxide has been dissolved before a process for forming the deposited film.

REFERENCES:
patent: 4504518 (1985-03-01), Ovshinsky et al.
patent: 5170683 (1992-12-01), Kawada et al.
patent: 5314780 (1994-05-01), Takei et al.

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