Electrooptic device, liquid crystal device, and projection...

Details Electrooptic device, liquid crystal device, and projection... Electrooptic device, liquid crystal device, and projection...

2007-07-17

2007-07-17

Schechter, Andrew (Department: 2871)

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

C257S617000, C257S347000

Reexamination Certificate

active

10314266

ABSTRACT:
To provide an electrooptic device which can reliably suppress a substrate floating effect, such as a parasitic bipolar phenomenon, in an SOI-MIS transistor, and which has superior electrical characteristics. An electrooptic device (liquid crystal light valve) of the present invention uses, as one substrate, a composite substrate including a quartz substrate (main substrate10A) having a first coefficient of thermal expansion, an insulating layer (insulating underlayer12) formed on the quartz substrate, and a single-crystal silicon layer (semiconductor layer1a) formed on the insulating layer and having a second coefficient of thermal expansion. A TFT30that uses the single-crystal silicon layer as a channel region1a′is formed on the insulating layer, and at least one line defect D exists in the single-crystal silicon layer that forms the channel region1a′.

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