Electronically variable surface acoustic wave phase shifter

Details Electronically variable surface acoustic wave phase shifter Electronically variable surface acoustic wave phase shifter

1976-04-15

1977-01-25

Smith, Alfred E.

Wave transmission lines and networks

Coupling networks

With impedance matching

310 8, 310 97, 357 23, 357 26, H03H 930, H01L 4108, H01L 2976

Patent

active

040053768

ABSTRACT:
An electrically variable surface acoustic wave phase shifter including a strate upon which a piezoelectric layer is deposited and separated therefrom by an insulating layer. An electrode is deposited on the piezoelectric layer and on the bottom of the substrate with an electrical dc bias applied onto the electrodes which causes a charge accumulation or a depletion region at the silicon surface. This charge accumulation or depletion region causes the boundary conditions to change therefore causing a phase change in an acoustical wave propagating along the layered silicon surface.

REFERENCES:
patent: 3633996 (1972-01-01), Lean et al.
patent: 3679985 (1972-07-01), Fang et al.
patent: 3827002 (1974-07-01), Chao
patent: 3867012 (1975-02-01), Phillips
patent: 3877982 (1975-04-01), Coldren et al.
patent: 3935564 (1976-01-01), Quate et al.

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