Electronically-variable immersion electrostatic lens

Details Electronically-variable immersion electrostatic lens Electronically-variable immersion electrostatic lens

2005-10-26

2008-11-04

Vanore, David A. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S397000, C250S398000

Reexamination Certificate

active

07446320

ABSTRACT:
One embodiment relates to an electronically-variable electrostatic immersion lens in an electron beam apparatus. The electrostatic immersion lens includes a top electrode configured with a first voltage applied thereto, an upper bottom electrode configured with a second voltage applied thereto, and a lower bottom electrode configured with a third voltage applied thereto. The third voltage is controlled separately from the second voltage. Other embodiments are also disclosed.

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