Electronically controlled cryopump and network interface

Details Electronically controlled cryopump and network interface Electronically controlled cryopump and network interface

1992-08-27

1993-11-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62126, B01D 800

Patent

active

052654311

ABSTRACT:
A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.

REFERENCES:
patent: 4918930 (1990-04-01), Gaudet et al.
patent: 4970870 (1990-11-01), Midlang et al.
patent: 5010737 (1991-04-01), Okumura et al.
Brown, Thomas G. et al., "Microcomputer Applications In The Space Simulation Laboratory," Proceedings--Institute of Environmental Sciences, 1983, pp. 179-188.
Finley, Laurence, "Automatic regeneration of multiple cryopumps" J. Vac. Sci. Technol. A4(3), May/Jun. 1986, American Vacuum Society, pp. 310-313.

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