Electronically controlled cryopump

Refrigeration – Low pressure cold trap process and apparatus

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62129, B01D 800

Patent

active

053437080

ABSTRACT:
A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.

REFERENCES:
patent: 4354356 (1982-10-01), Milner
patent: 4361418 (1982-11-01), Tscheppe
patent: 4412851 (1983-11-01), Laine
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4456613 (1985-10-01), Eacobacci et al.
patent: 4602642 (1986-07-01), O'Hara et al.
patent: 4614093 (1986-09-01), Bachler et al.
patent: 4633672 (1967-01-01), Persem et al.
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4688261 (1987-05-01), Chatzipetros et al.
patent: 4724677 (1988-02-01), Foster
patent: 4757689 (1988-07-01), Bachler et al.
patent: 4953359 (1990-09-01), Forth et al.
patent: 4958499 (1990-09-01), Haefner et al.
Sheats and Halverson, "State of the Art Microprocessor Technology applied to cryogenic temperature readout and control," Cryogenic Conference, San Diego, Calif. 1981, pp. 1183-1188.
Finley, "Automatic regeneration of multiple cryopumps," J. Vac. Sci. Technol. A4(3), May/Jun. 1986, pp. 310-313.
Peterson, Solid State Technology, Apr. 1986, pp. 199-201.
Temescal product description, Sep. 1982.
Longsworth et al., J. Vac. Sci. Technol., 21(4), Nov./Dec. 1982.
Peterson et al., Solid State Technology, Jan. 1982, pp. 104-110.
Sievert, Solid State Technology, May 1986, pp. 90-92.
Singer, Update on Cryogenic Pumps, Oct. 1982, pp. 89-99.
Ehmann, Solid State Technology, Apr. 1982, pp. 235-239.
Brown et al., Proceedings, 1983, pp. 179-188.
Sheats et al., Cryogenic Conference, Aug. 15-19, 1983.
Cryopumping, 4 pages, 1986.

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