Electronically controlled cryopump

Details Electronically controlled cryopump Electronically controlled cryopump

1992-09-11

1994-09-06

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62129, B01D 800

Patent

active

053437080

ABSTRACT:
A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.

REFERENCES:
patent: 4354356 (1982-10-01), Milner
patent: 4361418 (1982-11-01), Tscheppe
patent: 4412851 (1983-11-01), Laine
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4456613 (1985-10-01), Eacobacci et al.
patent: 4602642 (1986-07-01), O'Hara et al.
patent: 4614093 (1986-09-01), Bachler et al.
patent: 4633672 (1967-01-01), Persem et al.
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4688261 (1987-05-01), Chatzipetros et al.
patent: 4724677 (1988-02-01), Foster
patent: 4757689 (1988-07-01), Bachler et al.
patent: 4953359 (1990-09-01), Forth et al.
patent: 4958499 (1990-09-01), Haefner et al.
Sheats and Halverson, "State of the Art Microprocessor Technology applied to cryogenic temperature readout and control," Cryogenic Conference, San Diego, Calif. 1981, pp. 1183-1188.
Finley, "Automatic regeneration of multiple cryopumps," J. Vac. Sci. Technol. A4(3), May/Jun. 1986, pp. 310-313.
Peterson, Solid State Technology, Apr. 1986, pp. 199-201.
Temescal product description, Sep. 1982.
Longsworth et al., J. Vac. Sci. Technol., 21(4), Nov./Dec. 1982.
Peterson et al., Solid State Technology, Jan. 1982, pp. 104-110.
Sievert, Solid State Technology, May 1986, pp. 90-92.
Singer, Update on Cryogenic Pumps, Oct. 1982, pp. 89-99.
Ehmann, Solid State Technology, Apr. 1982, pp. 235-239.
Brown et al., Proceedings, 1983, pp. 179-188.
Sheats et al., Cryogenic Conference, Aug. 15-19, 1983.
Cryopumping, 4 pages, 1986.

Affiliated with

Also associated with

Rating

Electronically controlled cryopump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electronically controlled cryopump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electronically controlled cryopump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1321981