Electronic substrate processing system using portable closed con

Details Electronic substrate processing system using portable closed con Electronic substrate processing system using portable closed con

1997-02-24

1998-05-05

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

Houses, kilns, and containers

34217, G26B 1900

Patent

active

057460086

ABSTRACT:
Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

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