Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate
2005-10-25
2005-10-25
Eckert, George (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
C257S377000, C257S295000, C257S310000, C257S531000, C438S623000
Reexamination Certificate
active
06958526
ABSTRACT:
An apparatus and method is described incorporating one or more layers of SiCOH and one or more layers of patterned conductors in an integrated circuit chip. The invention overcomes the problem of capacitance by lowering the k of the delectric and overcomes the problem of breakdown voltage and the leakage curent by tailoring the composition of SiCOH.
REFERENCES:
patent: 6337151 (2002-01-01), Uzoh et al.
patent: 6528432 (2003-03-01), Ngo et al.
patent: 6737727 (2004-05-01), Gates et al.
patent: 2002/0084257 (2002-07-01), Bjorkman et al.
patent: 2003/0017635 (2003-01-01), Apen et al.
patent: 2004/0051178 (2004-03-01), Cohen et al.
Gates Stephen McConnell
Grill Alfred
Eckert George
Fenty Jesse A.
International Business Machines - Corporation
Scully Scott Murphy & Presser
Trepp, Esq. Robert M.
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