Electronic spectrometer for identifying element conditions of a

Details Electronic spectrometer for identifying element conditions of a Electronic spectrometer for identifying element conditions of a

1986-06-09

1988-06-21

Church, Craig E.

Radiant energy

Electron energy analysis

250306, 378 82, H01J 4948

Patent

active

047526858

ABSTRACT:
A photoelectron spectrometer includes a target, an electron gun, a crystal plate, a spectrum-analyzer and a detector. The target and the sample to be inspected are aligned with a reference line. The electron gun is positioned on the coaxially line with respect to the reference axis. The crystal plate is arranged in a circular region with respect to the reference axis, so that X-ray beams emitted from the target are omnidirectionally irradiated to the sample surface in an electron shower form. The sensitivity of the photoelectron spectrometer is increased.

REFERENCES:
patent: 3242335 (1966-03-01), Watanabe et al.
patent: 4562352 (1985-12-01), Shiokawa
Fellner-Feldegg et al., Journal of Electron Spectroscopy and Related Phenomena, 5(1974), 643-689.

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