Electricity: measuring and testing – Using ionization effects – For monitoring pressure
Reexamination Certificate
2005-11-09
2009-10-27
Vanore, David A (Department: 2881)
Electricity: measuring and testing
Using ionization effects
For monitoring pressure
C324S459000, C324S462000, C324S464000, C324S468000, C324S470000, C315S111910, C250S42300F, C250S424000, C250S427000, C250S489000, C250S336100, C250S389000
Reexamination Certificate
active
07609067
ABSTRACT:
Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement. In one embodiment, an ion gauge substrate is formed. The electronic portion of the MEMs ion gauge is assembled by coupling a plurality of ion collectors with the ion gauge substrate, wherein the coupling of the plurality of ion collectors with the ion gauge substrate further comprises performing an operation that causes the plurality of ion collectors to be bowed out of plane to form a three dimensional arrangement.
REFERENCES:
patent: 4747311 (1988-05-01), Hojoh
patent: 5493177 (1996-02-01), Muller et al.
patent: 6051923 (2000-04-01), Pong
patent: 6995502 (2006-02-01), Hwu et al.
patent: WO 95/12211 (1995-05-01), None
Chen Chien-Hua
McKinnell James
Hewlett--Packard Development Company, L.P.
Maskell Michael
Vanore David A
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