Electronic optical apparatus comprising pyrolytic graphite eleme

Details Electronic optical apparatus comprising pyrolytic graphite eleme Electronic optical apparatus comprising pyrolytic graphite eleme

1983-01-11

1985-04-02

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, 2505051, G01N 2300

Patent

active

045089671

ABSTRACT:
The electronic optical apparatus provided is such that the parts situated in the immediate vicinity of the beam, anode, screen placed inside the condenser block, screen formed from a tube and limiter diaphragms inside the deflection block, screen placed between the final focussing lens and the sample to be observed and the secondary electron collector electrode have their faces exposed to the electron beam formed from pyrolytic graphite.

REFERENCES:
patent: 3634684 (1972-01-01), Sato
patent: 4220889 (1980-09-01), Marhic et al.
patent: 4387320 (1983-06-01), Hoet
patent: 4417175 (1983-11-01), Carren et al.
"Spectrometer Shield for Stray Iron X-Ray Radiation in the Scanning Electron Microscope", Ballard et al., Rev. of Sci. Inst., vol. 42, No. 1, Jan. 1971.

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