Electronic microvalve apparatus and fabrication

Details Electronic microvalve apparatus and fabrication Electronic microvalve apparatus and fabrication

1989-12-27

1992-01-21

Rosenthal, Arnold

Valves and valve actuation

Electrically actuated valve

251331, 251368, 25112908, 356352, F16K 3102

Patent

active

050822420

ABSTRACT:
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.

REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 4530317 (1985-07-01), Schutten
patent: 4581624 (1986-04-01), O'Connor
patent: 4585209 (1986-04-01), Aine et al.
patent: 4619438 (1986-10-01), Coffee
patent: 4825262 (1989-04-01), Mallinson

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