Electronic device with electrode and its manufacture

Details Electronic device with electrode and its manufacture Electronic device with electrode and its manufacture

2006-12-26

2006-12-26

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

Reexamination Certificate

active

07153705

ABSTRACT:
A method of manufacturing an electronic device includes the steps of: (a) preparing a (001) oriented ReO3layer; and (b) forming a (001) oriented oxide ferroelectric layer having a perovskite structure on the ReO3layer. Preferably, the step (a) includes the steps of: (a-1) preparing a (001) oriented MgO layer; and (a-2) forming a (001) oriented ReO3layer on the MgO layer. An electronic device capable of obtaining a ferroelectric layer of a large polarization and a method of manufacturing the same are provided.

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