Electronic device with a spin-on glass dielectric layer

Details Electronic device with a spin-on glass dielectric layer Electronic device with a spin-on glass dielectric layer

1994-03-17

1996-06-18

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 13, 528 14, 528 21, 528 33, 528 34, 528 38, 524730, 525477, C08G 7708

Patent

active

055278728

ABSTRACT:
There is provided electronic devices with dielectric layers obtained from boron-oxide doped, spin-on glass formulations which form glassy layers with high oxygen resistance. Suitable electronic devices include integrated circuits. With high oxygen resistance, the glassy layer formed maintains its integrity in subsequent processing. Also provided is a method for preparing boron-oxide doped, spin-on glass formulations with a high carbon content having a silane adhesion promoter and boron-dopant incorporated therein.

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Morimoto et al., "Manufacturable and Reliable Spin-on Glass Planarization . . . Layer Technology", 5th Int'l. VLSI Multilevel Interconnect Conference Santa Clara, CA, Jun. 13-15, 1988, pp. 411-415.

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