Electronic device with a spin-on glass dielectric layer

Details Electronic device with a spin-on glass dielectric layer Electronic device with a spin-on glass dielectric layer

1996-03-01

1997-09-09

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From boron reactant having at least one boron to hydrogen or...

428447, 438780, 257791, C08G 7908

Patent

active

056658451

ABSTRACT:
There is provided electronic devices with dielectric layers obtained from boron-oxide doped, spin-on glass formulations which form glassy layers with high oxygen resistance. Suitable electronic devices include integrated circuits. With high oxygen resistance, the glassy layer formed maintains its integrity in subsequent processing. Also provided is a method for preparing boron-oxide doped, spin-on glass formulations with a high carbon content having a silane adhesion promoter and boron-dopant incorporated therein.

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