Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2006-01-26
2009-11-10
Ho, Tu-Tu V (Department: 2818)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
C438S115000, C438S667000, C257S693000, C257S690000, C257S698000, C257SE23011, C257SE23067
Reexamination Certificate
active
07615406
ABSTRACT:
By joining a lid member to a base member, internal electrodes put in contact with the lid member and an electronic device connected to the internal electrodes are placed in an internal space located in between the base member and the lid member. By performing etching from a surface of the lid member on a side opposite from the base member by a prescribed method, through holes that reach the surface of the internal electrodes are formed. A conductive material is applied to the through holes, and external electrodes connected to the internal electrodes are formed in a plane, completing a thin type electronic device package.
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Higashi Kazushi
Maegawa Yukihiro
Ho Tu-Tu V
Panasonic Corporation
Wenderoth , Lind & Ponack, L.L.P.
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