Electronic device manufacture using ion implantation

Details Electronic device manufacture using ion implantation Electronic device manufacture using ion implantation

1993-12-03

1995-01-24

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 40, 437 51, H01L 21266

Patent

active

053842669

ABSTRACT:
In the manufacture of liquid crystal display devices with drive circuits and of other large area electronics devices, discharge damage of tracks (9) and other parts of a thin-film pattern (12) can result during an ion-implantation step for forming transistors (15) and doping the tracks (9). This damage is avoided by providing a discharge path (10) which is so constructed in accordance with the invention that no extra processing steps are required, and the path (10) can be retained in the manufactured device. This discharge path has along its length a series of discharge gaps (20) which separate successive thin-film regions (10, 9) of the path and so provide electrical isolation for normal operation of the device. However, during the ion implantation, charge leakage occurs across the discharge gaps (20) between the separate successive regions (10, 9) of the path so providing a continuous and controlled discharge from the pattern (12).

REFERENCES:
patent: 5210045 (1993-05-01), Possin et al.
patent: 5286659 (1994-02-01), Mitani et al.
patent: 5290709 (1994-03-01), Sato
patent: 5300448 (1994-04-01), Merchant et al.

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