Electronic device manufacture

Details Electronic device manufacture Electronic device manufacture

2006-03-28

2006-03-28

Cameron, Erma (Department: 1762)

Coating processes

With post-treatment of coating or coating material

Heating or drying

Reexamination Certificate

active

07018678

ABSTRACT:
Methods for depositing uniform, pinhole-defect free organic polysilica coatings are provided. These methods allow for the use of these materials as spin-on cap layers in the manufacture of integrated circuits.

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