Electronic device manufacture

Details Electronic device manufacture Electronic device manufacture

1997-05-30

1999-11-09

Powell, William

Etching a substrate: processes

Forming or treating article containing a liquid crystal...

216 65, 216 67, 216 79, 438719, 438735, 438753, H01L 2100, B44C 122

Patent

active

059807636

ABSTRACT:
A flat panel display or other large-area electronic device comprises at least one TFT (T1;T2) having a crystalline channel region (1) and amorphous edge regions (13) adjacent side-walls (12) of the TFT island (11). The TFT is fabricated by steps which include:

REFERENCES:
patent: 5130829 (1992-07-01), Shannon
patent: 5508555 (1996-04-01), Brotherton et al.
patent: 5637187 (1997-06-01), Takasu et al.

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