Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2011-08-30
2011-08-30
Edwards, Laura (Department: 1717)
Coating apparatus
Gas or vapor deposition
C118S728000
Reexamination Certificate
active
08007590
ABSTRACT:
There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a substrate using the portable substrate carrier enclosure.
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CRC Handbook of Chemistry and Physics, 81stEdition, 2000-2001 (Book not Included).
Daly Thomas Patrick
Lang Charles D.
Perrotto Joseph Anthony
Tilton James Nelson
E.I. Du Pont de Nemours and Company
Edwards Laura
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