Electronic device includes an insulating film having density...

Details Electronic device includes an insulating film having density... Electronic device includes an insulating film having density...

2005-08-16

2005-08-16

Mai, Anh Duy (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

Reexamination Certificate

active

06930394

ABSTRACT:
A hole is formed in an insulating film containing silicon and carbon. The insulating film has a density or a carbon concentration varying gradually in the direction of the thickness thereof.

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