Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-12-27
2005-12-27
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C257S347000, C117S902000, C117S035000
Reexamination Certificate
active
06979938
ABSTRACT:
A thin film device comprises: a substrate and a thin film having a thickness formed on the substrate, wherein the thickness of the thin film is at least 1 micrometer, a crystal structure having crystals with a grain size formed within the thin film, wherein the grain size of a majority of the crystals includes a height to width ratio greater than three to two.
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Aguirrechea J.
Fay Sharpe Fagan Minnich & McKee LLP
Schuberg Darren
Xerox Corporation
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