Electronic device comprising an integrated time base

Details Electronic device comprising an integrated time base Electronic device comprising an integrated time base

1997-03-12

1999-01-05

Yoo, Do Hyun

Oscillators

Solid state active element oscillator

Transistors

331 74, 331116FE, 331176, H03B 532

Patent

active

058567658

ABSTRACT:
An electronic device (1) has a substrate (2) of monocrystalline silicon on which is an integrated circuit (3). The integrated circuit is an oscillator containing a resonator, a maintenance circuit to cause the vibration of the resonator, and a frequency division chain. The maintenance circuit as well as the division chain are manufactured as CMOS circuits. The resonator is an integrated resonator (4) formed of a body cut out in a delimited surface part of reduced thickness (14) of the substrate (2), of a thin layer of piezoelectric material (10) deposited on at least a part (6) of the body, and of a thin metallic layer (11) deposited on the piezoelectric layer (10) so as to form an electrode.

REFERENCES:
patent: 4456850 (1984-06-01), Inoue et al.
patent: 4640756 (1987-02-01), Wang et al.
patent: 5075641 (1991-12-01), Weber et al.
patent: 5166646 (1992-11-01), Avanic et al.
Krummenacher et al., "Smart Temperature Sensor in CMOS Technology", Sensors and Actuators, vol. A22, Mar. 1990, pp. 636-638.

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