Electronic device and method of use thereof

Details Electronic device and method of use thereof Electronic device and method of use thereof

1998-09-16

2000-07-04

Noori, Max

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

73777, G01B 716

Patent

active

060822007

ABSTRACT:
A miniature piezoresistive sensor includes an undoped single crystal and a doped diamond film deposited by a chemical vapor deposition process on the undoped polycrystalline diamond and having a single crystal grain size of about 1 micron to 1 millimeter. The sensor preferably includes metal contacts in contact with the doped film. The resistance of the sensor varies as a function of strain on the doped diamond film transmitted through the single grain. This inexpensive highly-sensitive sensor can be used for sensing pressure, acceleration, strain or weight. It can also be used as a thermistor.

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