Electronic device and method for manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Lateral bipolar transistor structure

Reexamination Certificate

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C257S643000, C257S644000, C257S711000, C257S765000, C257S767000, C257SE21413, C257SE21414, C257SE29151, C257SE29278

Reexamination Certificate

active

07446392

ABSTRACT:
An electronic device is provided using wiring comprising aluminum to prevent hillock or whisker from generating, wherein the wiring contains oxygen atoms at a concentration of 8×1018atoms·cm−3or less, carbon atoms at a concentration of 5×1018atoms·cm−3or less, and nitrogen atoms at a concentration of 7×1017atoms·cm−3or less; furthermore, a silicon nitride film is formed on the aluminum gate, and an anodic oxide film is formed on the side planes thereof.

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Case No. C 02-02800 WHA; Acer Incorporated and Acer America Corporation's Motion for Summary Judgment of Anticipation of 5,929,527 Patent; pp. 1-8; Jul. 9, 2003.
Case No. C 02-02800 WHA; Declaration of Peter J. Wied in Support of Acer Incorporated and Acer America Corporation's Motion for Summary Judgment of Anticipation of U.S. Patent No. 5,929,527 Patent; pp. 1-4; Jul. 9, 2003.
True and correct U.S. Patent No. 5,929,527 (Exhibit A of Declaration of Peter J. Wied).
Case No. C 02-02800 WHA; Final Claim-Construction Order For United States Patent Nos. 5,929,527, 6,355,941, 6,404,476, and 6,404,480; pp. 1-14, and Certificate of Service, pp. 1-3; Jun. 9, 2003 (Exhibit B of Declaration of Peter J. Wied).
True and correct U.S. Patent No. 5,485,019 (Exhibit C of Declaration of Peter J. Wied).
Webster's II New College Dictionary, Houghton Mifflin Company; 3 pages including cover page, copyright page, and p. 899; Copyright 2001, 1999, 1995 (Exhibit D of Declaration of Peter J. Wied).
Case No. C 02-02800 WHA; SEL's Opposition to Acer's Motion for Summary Judgment of Anticipation of U.S. Patent No. 5,929,527; Cover and pp. 1-8; Jul. 23, 2003.
Case No. C 02-02800 WHA; Declaration of L. Rafael Reif in Support of SEL's Opposition to Acer's Motion for Summary Judgment of Anticipation of U.S. Patent No. 5,929,527; pp. 1-4; Jul. 18, 2003.
Case No. C 02-02800 WHA; Declaration of Donald R. Harris in Support of SEL's Oppositions to the Five Summary Judgment Motions of AU and Acer; pp. 1-4; Jul. 23, 2003.
True and correct U.S. Patent No. 5,929,527 (Exhibit 2 of Declaration of Donald R. Harris).
True and correct U.S. Patent No. 5,485,019 (Exhibit 3 of Declaration of Donald R. Harris).
Wolf et al.; “Aluminium Thin Films and Physical Vapor Deposition in VLSI”; Silicon Processing for VLSI Era, Chapter 10; pp. 331-334; 1986 (Exhibit 4 of Declaration of Donald R. Harris).
Case No. C 02-02800 WHA; Acer Incorporated's Answer to First Amended Complaint for Patent Infringement and Counterclaims; pp. 1-11; Sep. 24, 2002 (Exhibit 5 of Declaration of Donald R. Harris).
Case No. C 02-02800 WHA; Case Management Order for Patent Case and Reference to Magistrate Judge for Settlement/Mediation; pp. 1-4; Sep. 11, 2002 (Exhibit 6 of Declaration of Donald R. Harris).
Case No. C 02-02800 WHA; Acer Incorporated and Acer America Corporation's Reply in Support of It's Motion For Summary Judgment of Anticipation of U.S. Patent No. 5,929,527; pp. 1-7; Jul. 29, 2003.
Case No. C 02-02800 WHA; Supplemental Declaration of Peter J. Weid in Support of Acer Incorporated and Acer America Corporation's Motion for Summary Judgment of Anticipation of U.S. Patent No. 5,929,527; pp. 1-4; Jul. 29, 2003.
Case No. C 02-02800 WHA; List of Issues on Which Plaintiff SEL will Offer Expert Testimony; pp. 1-4; Apr. 25, 2003 (Exhibit A of Declaration of Peter J. Wied).
Case No. C 02-02800 WHA; Videotape Deposition of Leo Rafael Reif, Ph.D. (word index); cover page and pp. 70-72 and p. 81; Feb. 18, 2003 (Exhibit B of Declaration of Peter J. Wied).
True and correct U.S. Patent No. 4,951,601 (Exhibit C of Declaration of Peter J. Wied).
Case No. C 02-02800 WHA; Case Management Order for Patent Case and Reference to Magistrate Judge for Settlement/Mediation; pp. 1-4; Sep. 11, 2002 (Exhibit D of Declaration of Peter J. Wied).
Case No. C 02-02800 WHA; Notice of Motion and SEL's Motion for Partial Summary Judgment on Defenses of Defendants; Memorandum of Points and Authorities (Redacted Version); pp. i-iii and pp. 1-18; Jul. 9, 2003.
Case No. C 02-02800 WHA; Declaration of Stanley A. Schlitter in Support of SEL's Two Motions for Partial Summary Judgment (Redacted Version); pp. 1-6; Jul. 9, 2003.
True and correct U.S. Patent No. 5,929,527 (Exhibit 22 of Declaration of Stanley A. Schlitter).
Case No. C 02-02800 WHA; Complaint for Patent Infringement—Demand for Jury Trial; pp. 1-7; Jun. 11, 2002 (Exhibit 23 of Declaration of Stanley A. Schlitter).
Case No. C 02-02800 WHA; Acer Incorporated and Acer America Corporation's Final Invalidity Contentions Pursuant to Patent Local Rule 3-6(B); pp. 1-2; Aug. 1, 2003.
Case No. C 02-02800 WHA; Exhibit A of Acer's Final Invalidity Contentions Pursuant to Patent Local Rule 3-6(B); pp. 1-4; Aug. 1, 2003.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); pp. 1-7; Aug. 4, 2003 with Appendixes 1-6 (listed separately below).
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 1: Prior Art for Supplemented Final Invalidity Contentions—U.S. Patent No. 5,929,527; p. 1.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 2: Claim Charts for Supplemented Final Invalidity Contentions—U.S. Patent No. 5,929,527; p. 1.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 3: Prior Art for Supplemented Final Invalidity Contentions—U.S. Patent No. 6,355,941; pp. 1-4.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 4: Claim Charts for Supplemented Final Invalidity Contentions—U.S. Patent No. 6,355,941; pp. 1-61.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 5: Prior Art for Supplemented Final Invalidity Contentions—U.S. Patent No. 6,404,480; pp. 1-2.
Case No. C 02-02800 WHA; Supplemented Final Invalidity Contentions of AU Optronics Corporation Pursuant to Patent L.R. 3-6(b)(1); Appendix 6: Claim Charts for Supplemented Final Invalidity Contentions—U.S. Patent No. 6,404,480; pp. 1-11.
Expert Witness Report of Ian D. Hutcheon, pp. 1-7, May 23, 2003.
Prosecution History of U.S. Patent 5,929,527 (Exhibit 2 of Expert Witness Report of Ian D. Hutcheon; U.S. Patent 5,929,527 is Exhibit 1).
Data Sheets from Charles Evans and Associates for each of the three implant standards—C, N and O, all implanted into A1 (Exhibit 3 of Expert Witness Report of Ian D. Hutcheon).
My Laboratory notebook of Ian D. Hutcheon for the two days of SIMS analysis at Fibics, May 15 & 16, 2003 (Exhibit 4 of Expert Witness Report of Ian D. Hutcheon).
Jochonia Nxumalo, A Non-Infringement Analysis of Acer L150X28 LCD Panel with Respect to U.S. Patent No. 5,929,527, Semico

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