Electronic device and method for forming a membrane for an elect

Details Electronic device and method for forming a membrane for an elect Electronic device and method for forming a membrane for an elect

1998-07-22

2000-02-08

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Chemically responsive

438 48, G01N 2712

Patent

active

060227540

ABSTRACT:
An electronic device comprises a semiconductor substrate (2) having a cavity (32) extending into the substrate (2), a membrane (8) formed over the semiconductor substrate so as to extend across the cavity (32) in the semiconductor substrate and an active region (14, 30) supported by the membrane (8) and positioned adjacent the cavity (32). The membrane (8) comprises a single dielectric layer formed of an oxy-nitride material.

REFERENCES:
patent: 4706493 (1987-11-01), Chang et al.
patent: 5545300 (1996-08-01), Yun et al.
Stanley Wolf and richard N. Tauber, Silicon Processing for the VLSI Era, 1986.

Affiliated with

Also associated with

Rating

Electronic device and method for forming a membrane for an elect does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electronic device and method for forming a membrane for an elect, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electronic device and method for forming a membrane for an elect will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1680384