Electronic device

Details Electronic device Electronic device

2008-03-18

2008-03-18

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S349000, C310S365000

Reexamination Certificate

active

10584042

ABSTRACT:
The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of substrate (30) and a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path through the MEMS element (101) comprises the piezoelectric layer (25) and the tunable gap.

REFERENCES:
patent: 3646413 (1972-02-01), Oomen
patent: 4675960 (1987-06-01), Higgins, Jr.
patent: 4759823 (1988-07-01), Asselanis et al.
patent: 5880553 (1999-03-01), Okeshi et al.
patent: 7122942 (2006-10-01), Song et al.
patent: 2002/0109436 (2002-08-01), Peng et al.
patent: 2004/0075366 (2004-04-01), Mehta
patent: 2005/0151444 (2005-07-01), Mehta
patent: 2005/0194867 (2005-09-01), Kawakubo et al.
patent: 2005/0236935 (2005-10-01), Ohmori et al.
patent: 2006/0227489 (2006-10-01), Bunyan et al.
patent: 2864951 (2005-07-01), None
patent: 2 353 410 (2001-02-01), None
patent: WO 2005/064701 (2005-07-01), None

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