Electronic detection device and detector comprising such a...

Details Electronic detection device and detector comprising such a... Electronic detection device and detector comprising such a...

2007-08-21

2008-09-09

Porta, David P. (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07423270

ABSTRACT:
This electronic detection device comprises a substrate and at least one microstructure, said microstructure comprising a membrane which extends substantially facing and at a distance from said substrate, said membrane being mechanically attached and electrically connected to at least one longilineal retention element which is mechanically and electrically connected to said substrate via at least one post. The device also comprises at least one stiffener element extending over at least one of the main faces of said microstructure.

REFERENCES:
patent: 5399897 (1995-03-01), Cunningham et al.
patent: 5930594 (1999-07-01), Vilain
patent: 5949119 (1999-09-01), Vilain
patent: 6198098 (2001-03-01), Laou
patent: 0 753 671 (1997-01-01), None
Wu et al.,“Integration of the DRIE, MUMPs, and Bulk Micromachining for Superior Micro-Optical Systems,” IEEE, 2004, pp. 97-100.

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