Electronic component having a resonator and fabrication process

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S312000, C310S348000, C310S363000, C310S365000

Reexamination Certificate

active

10815472

ABSTRACT:
An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.

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K.M. Lakin et al., “Filter Banks Implemented With Integrated Thin Film Resonators”, 2000 IEEE Ultrasonics Symposium, vol. 1, Oct. 22, 2000, pp. 851-854, XP010541720.
French Preliminary Search Report dated Dec. 19, 2003 for French Application No. 03 04039.

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