Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1999-01-22
2000-09-26
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
361280, G01P 15125
Patent
active
061229636
ABSTRACT:
An electronic component includes a support substrate (101), a fixed electrode (113) overlying the support substrate (101), a movable electrode (123, 423) overlying the support substrate and the first electrode (113) wherein the first and second electrodes (113, 123, and 423) form a capacitor with a sensing area, an anchor (122, 422) coupled to the support substrate (101), and beams (125, 425) coupling different attachment points (129) of the second electrode (123, 423) to the anchor (122, 422) wherein the different attachment points (129) form a simply connected polygon and wherein a portion of the sensing area is located within the simply connected polygon.
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August Richard J.
Hammond Jonathan H.
Koury, Jr. Daniel N.
McNeil Andrew C.
Chapman John E.
Huffman A. Kate
Motorola Inc.
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